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Desktop Thermal Processing System

What is the SabreTube™?
  • The SabreTube™ is a desktop-scale machine enabling rapid innovation and precise control of thermal processes, such as growth of nanotubes/nanowires, curing of thin films, and heating of lab-on-a-chip devices.
Why is the SabreTube™ unique?
  • rapid heating
  • low cost
  • dynamic control up to over 1000 C
  • in-situ observation
Where is the SabreTube™ used?
  • research institutes, universities
  • industrial research labs
  • university teaching
SabreTube Features
Rapid substrate temperature control
  • up to 100 C/s
  • suspended resistively-heated silicon platform
  • modular heater assembly enables easy cleaning and replacement
Decoupled control of gas pre-treatment and substrate temperature
  • rapid “pre-heating” of gas enables growth of multi-millimeter carbon nanotube forests
Full-view optical access through quartz tube
  • adaptable for in situ characterization including laser measurement of film thickness X-ray scattering, etc.
More unique features
  • Atmospheric or low-pressure operation
  • Self-aligning lip seals
  • Non-contact IR sensor measures platform temperature
  • Quick, tool-free sample exchange
  • Small footprint (24”x12”x10”)
SabreTube Videos
Click here for the first ever in-situ videos of carbon nanotube growth, enabled by the SabreTube™ full-view optical access.
E.R. Meshot, D.L. Plata, S. Tawfick, Y.Y. Zhang, E.A. Verploegen, A.J. Hart. Engineering vertically aligned carbon nanotube growth by decoupled thermal treatment of precursor and catalyst. ACS Nano  3(9):2477-2486, 2009. doi:/10.1021/nn900446a
[Article - PDF]

E.R. Meshot, A.J. Hart. Abrupt self-termination of vertically-aligned carbon nanotube growth. Applied Physics Letters 92:113107, 2008. doi:/10.1063/1.2889497 [Article - PDF]

L.C. van Laake, A.J. Hart, A.H. Slocum. A Suspended Heated Silicon Platform for Rapid Thermal Control of Surface Reactions with Application to Carbon Nanotube Synthesis, Review of Scientific Instruments 78:083901, 2007,
doi:/10.1063/1.2760936 [Article - PDF]

A.J. Hart, L.C. van Laake, A.H. Slocum. Desktop Growth of Carbon Nanotube Monoliths with In Situ Optical Imaging, Small 3(5):772-777, 2007,
doi:10.1002/smll.200600716 [Article - PDF]

: The PDF documents on this webpage are provided for educational and personal purposes alone and are subject to copyrights of the respective publishers.

Download specifications of the SabreTube here
Applicable for...
Chemical vapor deposition (CVD)
  • nanotubes, nanowires
  • piezoelectric materials
  • dielectric matierials
  • other (thin) films
  • patterned deposition
  • conductive traces
  • transistor rapid thermal processing (RTP)
  • thin films
Die-level processing and testing
  • bonding
  • research-phase device testing
Download application note on CNT growth here